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Inevitable Errors in Thin Film Pressure Sensors

Release time:

2023-06-06 08:53

Inevitable errors
1. Offset error
Due to the constant vertical displacement of the pressure sensor throughout the entire pressure range, changes in transducer diffusion and laser adjustment correction will result in offset errors.
2. Sensitivity error
The magnitude of the error is proportional to the pressure. If the sensitivity of the device is higher than the typical value, the sensitivity error will be a function of pressure increase; If the sensitivity is lower than the typical value, the sensitivity error will be a decreasing function of pressure; The error is caused by changes in the diffusion process.
3. Linear error
This is a factor that has little effect on the initial error of the pressure sensor. This error is caused by the physical nonlinearity of the silicon chip. However, for sensors with amplifiers, the nonlinearity of the amplifier should also be included. The linear error curve can be a concave curve. It can also be a convex curve.
4. Hysteresis error
In most cases, the hysteresis error of pressure sensors can be completely ignored because silicon wafers have high mechanical stiffness and usually only need to consider the hysteresis error in cases of significant pressure changes.

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